EMA 4614 - Production of Electronic Materials

Credits: 3

Course Description: The course provides students with an up-to-date review of modern semiconductor chip fabrication. Topics include modern techniques for growth and characterization of crystalline silicon and semiconductor alloys, their characterization, processes for materials doping, such as diffusion and implantation, thin film deposition and wire bonding, wet and dry etching. Fabrication of electronic devices through photo-lithography and X-ray lithography techniques will be discussed. Students will be introduced to software for the design of multi-layer, lithography masks and mask alignment.
Prerequisites: EGN 3365 - Structure and Properties of Materials and PHZ 3442 - Semiconductor Physics